High-k Gate Dielectrics for CMOS Technology

High-k Gate Dielectrics for CMOS Technology

eBook - 2012
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A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological
viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these
materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies.

Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections
with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.
Publisher: Weinheim : Wiley-VCH, 2012.
ISBN: 9783527646371
9783527330324
Characteristics: 1 online resource (xxxi, 558 pages) : illustrations (some color)

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